Epitaxial graphene perfection vs. SiC substrate quality

作者: Dominika Teklinska , Kinga Kosciewicz , Kacper Grodecki , Mateusz Tokarczyk , Grzegorz Kowalski

DOI: 10.2478/S11534-010-0136-3

关键词:

摘要: Polytype instability of SiC epitaxial films was the main focus attention in experiment performed since this factor has a decisive influence on graphene growth, which second stage experiment. Layers deposited various initial C/Si ratios were analyzed.

参考文章(15)
Nicolas Camara, Jean-Roch Huntzinger, Gemma Rius, Antoine Tiberj, Narcis Mestres, Francesc Pérez-Murano, Philippe Godignon, Jean Camassel, Anisotropic growth of long isolated graphene ribbons on the C face of graphite-capped 6H-SiC Physical Review B. ,vol. 80, pp. 125410- ,(2009) , 10.1103/PHYSREVB.80.125410
D. Zhuang, J.H. Edgar, Wet etching of GaN, AlN, and SiC : a review Materials Science & Engineering R-reports. ,vol. 48, pp. 1- 46 ,(2005) , 10.1016/J.MSER.2004.11.002
S. Ha, H.J. Chung, N.T. Nuhfer, M. Skowronski, Dislocation nucleation in 4H silicon carbide epitaxy Journal of Crystal Growth. ,vol. 262, pp. 130- 138 ,(2004) , 10.1016/J.JCRYSGRO.2003.09.054
Wlodek Strupiński, Kinga Kościewicz, Jan Weyher, Andrzej Roman Olszyna, Effect of Substrates Thermal Etching on CVD Growth of Epitaxial Silicon Carbide Layers Materials Science Forum. pp. 155- 158 ,(2008) , 10.4028/WWW.SCIENTIFIC.NET/MSF.600-603.155
H. Tsuchida, I. Kamata, M. Nagano, Investigation of defect formation in 4H-SiC epitaxial growth by X-ray topography and defect selective etching Journal of Crystal Growth. ,vol. 306, pp. 254- 261 ,(2007) , 10.1016/J.JCRYSGRO.2007.05.006
S.A. Sakwe, R. Müller, P.J. Wellmann, Optimization of KOH etching parameters for quantitative defect recognition in n- and p-type doped SiC Journal of Crystal Growth. ,vol. 289, pp. 520- 526 ,(2006) , 10.1016/J.JCRYSGRO.2005.11.096
A. Drabińska, K. Grodecki, W. Strupiński, R. Bożek, K. P. Korona, A. Wysmołek, R. Stępniewski, J. M. Baranowski, Growth kinetics of epitaxial graphene on SiC substrates Physical Review B. ,vol. 81, pp. 245410- ,(2010) , 10.1103/PHYSREVB.81.245410
Dong Su Lee, Christian Riedl, Benjamin Krauss, Klaus von Klitzing, Ulrich Starke, Jurgen H. Smet, Raman Spectra of Epitaxial Graphene on SiC and of Epitaxial Graphene Transferred to SiO2 Nano Letters. ,vol. 8, pp. 4320- 4325 ,(2008) , 10.1021/NL802156W
Kinga Kościewicz, Wlodek Strupiński, Wojciech Wierzchowski, Krzysztof Wieteska, Andrzej Roman Olszyna, Polytypism Study in SiC Epilayers Using Electron Backscatter Diffraction Materials Science Forum. pp. 251- 254 ,(2010) , 10.4028/WWW.SCIENTIFIC.NET/MSF.645-648.251