Apparatus for reducing cool chamber particles

摘要: An improved cool chamber is provided which includes a gas manifold for redistributing the flow and reducing velocity of particles that are directed towards wafer. The has generally circular body defines plurality outlets. A tubes, each having first end second end, extend from body. coupled to at vent diffuser tube. sintered gasket providing point-of-use filtering diffusion gas. height different plane adapter plate bypass port also provided. employed conduct back into during de-pressurization.