Precise measurements of oxygen content: Oxygen vacancies in transparent conducting indium oxide films

作者: J. R. Bellingham , A. P. Mackenzie , W. A. Phillips

DOI: 10.1063/1.104858

关键词:

摘要: … of oxygen deficiency with carrier concentration in thin films of amorphous indium oxide. This has shown that there are ten times as many oxygen vacancies as … of every oxygen vacancy …

参考文章(7)
Burton L. Henke, Eric S. Ebisu, Low Energy X-Ray and Electron Absorption Within Solids (100-1500 eV Region). Advances in x-ray analysis. ,vol. 17, pp. 150- 213 ,(1973) , 10.1154/S0376030800005279
Raymond Castaing, Electron Probe Microanalysis Advances in Electronics and Electron Physics Volume 13. ,vol. 13, pp. 317- 386 ,(1960) , 10.1016/S0065-2539(08)60212-7
G. Frank, H. K�stlin, Electrical properties and defect model of tin-doped indium oxide layers Applied Physics A. ,vol. 27, pp. 197- 206 ,(1982) , 10.1007/BF00619080
J R Bellingham, W A Phillips, C J Adkins, Electrical and optical properties of amorphous indium oxide Journal of Physics: Condensed Matter. ,vol. 2, pp. 6207- 6221 ,(1990) , 10.1088/0953-8984/2/28/011
I. Hamberg, C. G. Granqvist, Evaporated Sn‐doped In2O3films: Basic optical properties and applications to energy‐efficient windows Journal of Applied Physics. ,vol. 60, pp. R123- R160 ,(1986) , 10.1063/1.337534
K.L. Chopra, S. Major, D.K. Pandya, Transparent conductors—A status review Thin Solid Films. ,vol. 102, pp. 1- 46 ,(1983) , 10.1016/0040-6090(83)90256-0
GF Giel Bastin, Hjm Hans Heijligers, Quantitative electron probe microanalysis of carbon in binary carbides Eindhoven University of Technology. pp. 291- 294 ,(1984)