作者: I Yamaguchi , N Kato
DOI:
关键词:
摘要: This specification discloses a positioning device for setting an article in predetermined position. The to be positioned by the has referential pattern of shape formed on surface thereof. comprises reference carrier means having whose base portion is substantially similar article. Means provided move plane and position where at least are optically superposed one upon other. two patterns may optical means. images scanned photoelectric converter means, which converts such into electrical signals. Detector associated with detect extent deviation between accordance outputs from