Apparatus for relatively positioning a plurality of objects by the use of a scanning optoelectric microscope
作者： Yoshio Matsumoto , Keiichi Okamoto
DOI:
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摘要: A positioning apparatus comprising marks for position detection which are respectively formed on a plurality of objects, means to cause optical images the detecting from respective objects reach scanning mechanism, mechanism at same time, detectors, each consists slit and photoelectric element, slits being arranged an identical axis so that as scanned by may be detected individually, driving device moves one basis signals effect relative objects.
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