作者: Akio Hashizume , Manabu Yamamoto , Yuya Akanishi , Kenji Kawaguchi
DOI:
关键词:
摘要: A substrate treatment apparatus is provided, which includes: a seal chamber including body having an opening, lid member provided rotatably with respect to the and configured close first liquid structure liquid-seals between body, internal space sealed from outside; rotating unit rotates member; holding/rotating holds in of chamber; supplying supplies rotated by unit.