Substrate treatment apparatus and substrate treatment method

作者: Akio Hashizume , Manabu Yamamoto , Yuya Akanishi , Kenji Kawaguchi

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摘要: A substrate treatment apparatus is provided, which includes: a seal chamber including body having an opening, lid member provided rotatably with respect to the and configured close first liquid structure liquid-seals between body, internal space sealed from outside; rotating unit rotates member; holding/rotating holds in of chamber; supplying supplies rotated by unit.

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