Reflection characterization of anisotropic ultrathin dielectric films on absorbing isotropic substrates

作者: Peep Adamson

DOI: 10.1016/J.SUSC.2009.09.007

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摘要: The reflection of linearly polarized light from an ultrathin anisotropic dielectric film on isotropic absorbing substrate is investigated analytically in the long-wavelength limit. All analytical results are correlated with numerical solution problem basis rigorous electromagnetic theory. Simple approach developed this work not only gives a physical insight into but also provides way estimating necessary experimental accuracy for optical diagnostics by characteristics. It shown that obtained expressions immediate interest determining parameters surface layers. Innovative possibilities properties layers upon materials discussed.

参考文章(50)
Dick Bedeaux, Jan Vlieger, Optical Properties of Surfaces ,(2002)
D. Bedeaux, G.J.M. Koper, E.A. v.d. Zeeuw, J. Vlieger, M. Wind, The definition and use of optical invariants for thin island films Physica A-statistical Mechanics and Its Applications. ,vol. 207, pp. 285- 292 ,(1994) , 10.1016/0378-4371(94)90386-7
P.E. Wierenga, M.J. Sparnaay, A. Van Silfhout, Reflectometric study of surface states and oxygen adsorption on clean Si(100) and (110) surfaces Surface Science. ,vol. 99, pp. 59- 69 ,(1980) , 10.1016/0039-6028(80)90576-2
Peep Adamson, Reflection characterization of multilayer surface films Surface Science. ,vol. 600, pp. 735- 742 ,(2006) , 10.1016/J.SUSC.2005.12.002
R. C. van Duijvenbode, E. A. van der Zeeuw, G. J. M. Koper, High precision scanning angle ellipsometry Review of Scientific Instruments. ,vol. 72, pp. 2407- 2414 ,(2001) , 10.1063/1.1368862
Yi-Jun Jen, Cheng-Hung Hsieh, Tsai-Sheng Lo, Optical constant determination of an anisotropic thin film via surface plasmon resonance: analyzed by sensitivity calculation Optics Communications. ,vol. 244, pp. 269- 277 ,(2005) , 10.1016/J.OPTCOM.2004.09.054
E. K. Mann, L. Heinrich, J. C. Voegel, P. Schaaf, Optical characterization of thin films: Beyond the uniform layer model Journal of Chemical Physics. ,vol. 105, pp. 6082- 6085 ,(1996) , 10.1063/1.472447
M. Schubert, Generalized ellipsometry and complex optical systems Thin Solid Films. ,vol. 313, pp. 323- 332 ,(1998) , 10.1016/S0040-6090(97)00841-9
D. Beaglehole, Ellipsometric study of the surface of simple liquids Physica B-condensed Matter. ,vol. 100, pp. 163- 174 ,(1980) , 10.1016/0378-4363(80)90003-0