High precision scanning angle ellipsometry

摘要: A home-built computer-controlled scanning angle ellipsometer setup is presented, together with a detailed method to derive the ellipsometric parameters ψ and Δ by applying null ellipsometry. The high positioning accuracy obtained stepper motors long path length make it possible assess various alignment methods. Some of methods proposed in literature do not give enough apply precision measurements. As reflectometer, levels reflection amplitudes as low 10−4.5 can be determined. In ellipsometry, intensity located using simplex algorithm including corrections for angular beam deviations caused component imperfections. With presented maximum only achieved four-zone averaging measurements, compensator fast axis fixed at 45°. four polarizer combinations different zones lead variations up 20° incidence angles close Brewster angle. first-order analysis co...