Method for calibrating the analyser and the polarizer in an ellipsometer
作者： M Ghezzo
DOI: 10.1088/0022-3727/2/10/420
关键词: Ellipsometry 、 Optics 、 Analyser 、 Materials science 、 Polarizer
摘要: A variation of the method developed by McCrackin et al. for calibrating analyser and polarizer in an ellipsometer is presented. The new useful as independent check results former a system averaging experimental errors.
sci-hub.se 参考文章(1)
Frank L. McCrackin, Elio Passaglia, Robert R. Stromberg, Harold L. Steinberg, Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry Journal of Research of the National Bureau of Standards Section A: Physics and Chemistry. ,vol. 67A, pp. 363- 377 ,(1963) , 10.6028/JRES.067A.040