A modified method for calibrating the analyser and the polarizer in an ellipsometer

作者: G Forgács

DOI: 10.1088/0022-3727/3/10/423

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摘要: There are given the formulae for calibrating analyser and polarizer in an ellipsometer case when both not perfect. According to them a modification of method proposed by Ghezzo 1969 calibration is presented which gives exact zero positions intersection loci minimum intensities measured at two different angles incidence with dielectric mirror.

参考文章(2)
M Ghezzo, Method for calibrating the analyser and the polarizer in an ellipsometer Journal of Physics D. ,vol. 2, pp. 1483- 1485 ,(1969) , 10.1088/0022-3727/2/10/420
Frank L. McCrackin, Elio Passaglia, Robert R. Stromberg, Harold L. Steinberg, Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry Journal of Research of the National Bureau of Standards Section A: Physics and Chemistry. ,vol. 67A, pp. 363- 377 ,(1963) , 10.6028/JRES.067A.040