The accuracy of the measurement of the ellipsometric parameters Δ and ψ

摘要: The discrepancy between the reproducibility of ellipsometric parameters Δ and ψ (0.01° in best cases) at any one particular setting polarizer, compensator analyzer, difference values measured different settings these components (even as high 2–3°) causes some doubts about validity optical determined from measurements. Some reasons for this have been mentioned previously literature present paper attempts to complete ideas. It is possible prove that when angle incidence carefully adjusted fixed polarizer analyzer azimuths measurements are done two (14π 34π) four sets azimuths, then average identical with true within experimental error.