The effects of polarizer ellipticity on ellipsometry measurements
作者： William R. Hunter , D.H. Eaton , C.T. Sah
DOI: 10.1016/0039-6028(70)90188-3
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摘要: Abstract Small errors in the relative amplitude attenuation tan Ψ of a reflecting surface can cause appreciable error calculated thickness thin film on substrate, especially if no prior knowledge refractive index is available. Such arise either perfect polarizer or an ideal compensator assumed analysis data. The exact ellipsometry equations including ellipticity are derived with numerical examples. A procedure for instrument calibration described, and experimental results using this presented.
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