MEMS absolute pressure sensor on a flexible substrate
作者： Moinuddin Ahmed , Donald P. Butler , Zeynep Celik-Butler
DOI: 10.1109/MEMSYS.2012.6170240
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摘要: … This likely occurs as the membrane hits the bottom of the cavity. At this point, the diaphragm has maximum strain induced on the bridge arms. The sensor output was linear for small …
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