Terahertz time-domain spectroscopy of films fabricated from SU-8

作者: S. Arscott , F. Garet , P. Mounaix , L. Duvillaret , J.-L. Coutaz

DOI: 10.1049/EL:19990146

关键词:

摘要: Terahertz time-domain spectroscopy has been used to characterise the refractive index and absorption coefficient of samples fabricated using negative photoresist SU-8, in frequency range 0.1-1.6 THz. At a 1 THz, corresponding dielectric constant loss tangent are 2.9 6.3/spl times/10/sup -6/, respectively.

参考文章(2)
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J.R. Thorpe, D.P. Steenson, R.E. Miles, High frequency transmission line using micromachined polymer dielectric Electronics Letters. ,vol. 34, pp. 1237- 1238 ,(1998) , 10.1049/EL:19980872