Integrated vertical screen microfilter system using inclined SU-8 structures
作者： Yong-Kyu Yoon , Jung-Hwan Park , Florent Cros , Mark G Allen , None
DOI: 10.1109/MEMSYS.2003.1189727
关键词:
摘要: … In this work, a multidimensional, vertical screen micro filter system … vertical screen filter has a mesh analogous to that of a window screen, in which structures are extended vertically …
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