Effect of heat sink on electromigration lifetime of Ni thin film

作者: Lin Huang , Shijie Chen , Fengshun Wu , Weisheng Xia , Hui Liu

DOI: 10.1109/ICEPT.2014.6922829

关键词:

摘要: Thermal design and thermal management are the key issues for electronic products during trend of miniaturization. Heat sink is one promising popular choices to relieve problem. In this paper, effect heat on electromigration (EM) lifetime Ni thin films investigated. It proved that had no influence temperature coefficient resistance (TCR), but could reduce rise (TR) raise breakdown voltage efficiently. The failure data with time obtained by accelerated test were analyzed ALTA software based Temperature-Non (T-NT) lognormal model. maximum allowable under service condition be 5 years 100% duty cycle 0.05% cumulative distribution function (CDF). summary, obviously improve EM film due its excellent dissipation ability.

参考文章(6)
Y.W. Chang, S.H. Chiu, Chih Chen, D.J. Yao, Effect of Si-die dimensions on electromigration failure time of flip-chip solder joints Materials Chemistry and Physics. ,vol. 127, pp. 85- 90 ,(2011) , 10.1016/J.MATCHEMPHYS.2011.01.023
A.S. Budiman, C.S. Hau-Riege, W.C. Baek, C. Lor, A. Huang, H.S. Kim, G. Neubauer, J. Pak, P.R. Besser, W.D. Nix, Electromigration-Induced Plastic Deformation in Cu Interconnects: Effects on Current Density Exponent, n , and Implications for EM Reliability Assessment Journal of Electronic Materials. ,vol. 39, pp. 2483- 2488 ,(2010) , 10.1007/S11664-010-1356-4
Wei Yao, Cemal Basaran, Electromigration analysis of solder joints under ac load: A mean time to failure model Journal of Applied Physics. ,vol. 111, pp. 063703- ,(2012) , 10.1063/1.3693532
R. G. Filippi, P.-C. Wang, A. Brendler, K. Chanda, J. R. Lloyd, Implications of a threshold failure time and void nucleation on electromigration of copper interconnects Journal of Applied Physics. ,vol. 107, pp. 103709- ,(2010) , 10.1063/1.3357161
Robert Fernandez, Desalegne Teweldebrhan, Chen Zhang, Alexander Balandin, Sakhrat Khizroev, A comparative analysis of Ag and Cu heat sink layers in L10-FePt films for heat-assisted magnetic recording Journal of Applied Physics. ,vol. 109, ,(2011) , 10.1063/1.3564968
W. Escher, B. Michel, D. Poulikakos, A novel high performance, ultra thin heat sink for electronics International Journal of Heat and Fluid Flow. ,vol. 31, pp. 586- 598 ,(2010) , 10.1016/J.IJHEATFLUIDFLOW.2010.03.001