Load lock chamber with slit valve doors
作者： Shinichi Kurita
DOI:
关键词:
摘要: The present invention generally provides a load lock chamber having slit valve doors. is used to connect transfer factory interface, or two chambers. When the between adjacent chambers, has doors within which seal against an inside surface of chamber. can thus be serviced at atmospheric pressure without breaking vacuum in chambers because presses surface. and one door disposed outside seals from interface side helps press
lens.org 参考文章(10)
Jared Ahmad Lee, Paul B. Reuter, Andrew Nguyen, Martin Jeffrey Salinas, Abatement and strip process chamber in a dual loadlock configuration ,(2012)
Travis Morey, James D. Carducci, Matthew F. Davis, Kenneth J. Bahng, Apparatus for efficient removal of halogen residues from etched substrates ,(2009)
Shinichi Kurita, Wendell T. Blonigan, Load lock chamber having two dual slot regions ,(2001)
Robert B. Moore, Satish Sundar, Eric Ruhland, Mario David Silvetti, Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same ,(2007)
Shinichi Kurita, Suhail Anwar, Mehran Behdjat, Makoto Inagawa, Load lock chamber for large area substrate processing system ,(2004)
Tony R. Kroeker, Three chamber load lock apparatus ,(2001)
Shinichi Kurita, Wendell T. Blonigan, Double dual slot load lock chamber ,(2007)
Shinichi Kurita, Suhail Anwar, Jae-Chull Lee, Load lock chamber with decoupled slit valve door seal compartment ,(2007)
Liwei Li, Soo Young Choi, Method of forming thin film solar cells ,(2007)