Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
作者： Robert B. Moore , Satish Sundar , Eric Ruhland , Mario David Silvetti
DOI:
关键词: Transfer (computing) 、 Interfacing 、 Robot 、 Engineering 、 Process (computing) 、 Record locking 、 Computer hardware
摘要: A new apparatus for processing substrates is disclosed multi-level load lock chamber (10) having four environmentally isolated chambers interfaces with a transfer (400) that has robotic assembly (600) The two arms (618) each move horizontally as the rotates about its axis reach into of to receive from bottom chamber, transport process chambers, and then place in upper have pivotally attached lid may be opened access inside
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