Method for manufacturing tunnel-effect sensors
作者： Markus Biebl , Emmerich Bertagnolli
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摘要: In a method for manufacturing tunnel-effect sensors, tip (2) composed of the silicon substrate (1) is produced on with electrically conductively doped regions (4) by oxidation using nitride mask surface. Using planarized oxide layer (5) in step, beam (3) polysilicon that anchored applied, example, over as cooperating electrodes utilization tunnel effect and doped. Subsequently, removed.
lens.org 参考文章(15)
Brian G. Bagley, Tirunelveli Subramaniam Ravi, Robert Boris Marcus, Self-aligned gated electron field emitter ,(1991)
Robert T. Longo, Arthur E. Manoly, Randy K. Rolph, Arlene E. Lamb, Ralph Forman, Zaher Bardai, Self-aligned gate process for fabricating field emitter arrays ,(1990)
Anton J. Miller, Jeffrey T. Koze, Integrated circuits from wafers having improved flatness ,(1988)
Stephen Y. Chou, Quantum tunneling cantilever accelerometer ,(1985)
Lj. Ristic, M.L. Kniffin, R. Gutteridge, H.G. Hughes, Properties of polysilicon films annealed by a rapid thermal annealing process Thin Solid Films. ,vol. 220, pp. 106- 110 ,(1992) , 10.1016/0040-6090(92)90556-Q
J. P. Spallas, Self-aligned silicon field emission cathode arrays formed by selective, lateral thermal oxidation of silicon Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 11, pp. 437- 440 ,(1993) , 10.1116/1.586879
T. W. Kenny, W. J. Kaiser, J. K. Reynolds, J. A. Podosek, H. K. Rockstad, E. C. Vote, S. B. Waltman, Electron Tunnel Sensors Journal of Vacuum Science and Technology. ,vol. 10, pp. 2114- 2118 ,(1992) , 10.1116/1.577991
T. W. Kenny, S. B. Waltman, J. K. Reynolds, W. J. Kaiser, Micromachined silicon tunnel sensor for motion detection Applied Physics Letters. ,vol. 58, pp. 100- 102 ,(1991) , 10.1063/1.104432
H.-C. Lee, R.-S. Huang, A theoretical study on field emission array for microsensors IEEE Transactions on Electron Devices. ,vol. 39, pp. 313- 324 ,(1992) , 10.1109/16.121688
Komatsu Hiroshi, Field emission device and process for producing the same. ,(1991)