XRR detector readout processing

作者: Boris Yokhin , Isaac Mazor , David Berman , Alexander Dikopoltsev

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摘要: Reflectometry apparatus includes a radiation source, adapted to irradiate sample with over range of angles relative surface the sample, and detector assembly, positioned receive reflected from generate signal responsive thereto. A shutter is adjustably positionable intercept radiation, having blocking position, in which it blocks lower portion angles, thereby allowing reach array substantially only higher range, clear reaches without blockage.

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