Advances in scanning electron microscopy

摘要: Publisher Summary This chapter discusses the advances in scanning electron microscopy (SEM). Alternatives to previously characterized main body, physical part, or column of SEM have progressively been introduced, including (1) columns for spectrometers, such as those suitable be inserted inside a cylindrical mirror energy analyzer, (2) testers and lithographs semiconductor technology, (3) miniaturized versions. The issues regarding further development classical general-purpose are discussed chapter. Computer-aided design methods calculation electrostatic magnetic elements simulation trajectories enabled significant progress tailoring prescribed optical parameters. Complete computer control device opens approaches full utilization easy adjustment all possible operation modes. These two aspects most important with regard recent outlined chapter, some new ideas proved viable, particularly that variable beam along column. In SEM, technologies—such rare-earth based permanent magnets family various micro- nanotechnologies projected themselves into instrumentation—are used.