Automatic dextrous microhandling based on a 6-DOF microgripper
作者： Quan Zhou , Petteri Korhonen , Sami Sjövall , Jukka Laitinen
DOI: 10.1163/156856306777924662
关键词:
摘要: The demand for automatic quality inspection of individual micro-components has increased strongly in the micro-optoelectronics industry. In many cases, those needs dexterous microhandling. However, handling microcomponents is a very challenging issue which barely explored. This paper presents high-DOF (degrees freedom) and system micro-optoelectronic components using novel 6-DOF piezoelectric microgripper. control includes three hierarchical layers: an actuator layer, motion planning layer mission layer. Machine vision applied manipulation. performance demonstrated vision-based task 300 × 100- μ m-sized optoelectronics reached cycle time 7.1 ± 0.3 s.
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T. Kozuka, T. Tuziuti, H. Mitome, T. Fukuda, Acoustic micromanipulation using a multi-electrode transducer MHS'96 Proceedings of the Seventh International Symposium on Micro Machine and Human Science. pp. 163- 170 ,(1996) , 10.1109/MHS.1996.563418
Kortschack, Fatikow, Development of a mobile nanohandling robot Journal of Micromechatronics. ,vol. 2, pp. 249- 269 ,(2002) , 10.1163/156856304773954313
T. Ito, T. Torii, T. Higuchi, Electrostatic micromanipulation of bubbles for microreactor applications international conference on micro electro mechanical systems. pp. 335- 338 ,(2003) , 10.1109/MEMSYS.2003.1189754
H. Aoyama, S. Hiraiwa, F. Iwata, J. Fukaya, A. Sasaki, Miniature robot with micro capillary capturing probe MHS'95. Proceedings of the Sixth International Symposium on Micro Machine and Human Science. pp. 173- 178 ,(1995) , 10.1109/MHS.1995.494235
F. Arai, T. Sugiyama, T. Fukuda, H. Iwata, K. Itoigawa, Micro tri-axial force sensor for 3D bio-micromanipulation international conference on robotics and automation. ,vol. 4, pp. 2744- 2749 ,(1999) , 10.1109/ROBOT.1999.774012
J. Agnus, P. De Lit, C. Clevy, N. Chaillet, Description and performances of a four-degrees-of-freedom piezoelectric gripper Proceedings of the IEEE International Symposium onAssembly and Task Planning, 2003.. pp. 66- 71 ,(2003) , 10.1109/ISATP.2003.1217189
J.A. Thompson, R.S. Fearing, Automating microassembly with ortho-tweezers and force sensing intelligent robots and systems. ,vol. 3, pp. 1327- 1334 ,(2001) , 10.1109/IROS.2001.977166
P. Kallio, Quan Zhou, H.N. Koivo, Control issues in micromanipulation MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388). pp. 135- 141 ,(1998) , 10.1109/MHS.1998.745766
T. Kozuka, Non-contact acoustic filtering of particles by a standing wave field Proceedings of 2002 International Symposium on Micromechatronics and Human Science. pp. 165- 168 ,(2002) , 10.1109/MHS.2002.1058028
P. Kallio, M. Lind, Quan Zhou, H.N. Koivo, A 3-DOF piezohydraulic parallel micromanipulator international conference on robotics and automation. ,vol. 2, pp. 1823- 1828 ,(1998) , 10.1109/ROBOT.1998.677432