The Study on Characteristics of Platinum Thin Film RTD Temperature Sensors with Annealing Conditions

摘要: Platinum thin films were deposited on and substrates by DC magnetron sputtering for RTD (resistance thermometer devices) temperature sensors. The resistivity sheet of these decreased with increasing the annealing time. We made Pt resistance pattern substrate lift-off method fabricated Pt-RTD sensors using W-wire, silver epoxy SOG(spin-on-glass). In range , we investigated TCR(temperature coefficient resistance) ratio TCR values increased temperature, time thickness films. Resistance varied linearly within measurement temperature. At 240min film obtained value close to bulk value.