Fabrication and characterization of micro-heaters with low-power consumption using SOI membrane and trench structures
作者： Gwiy-Sang Chung
DOI: 10.1016/J.SNA.2003.10.076
关键词:
摘要: … of Pt thin-film type micro-heater integrated with Pt-RTD, a built up MgO, a medium layer on the SOI membrane and the trench structure. The fabricated micro-heater and Pt-RTD were …
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