Sub-ppm level MEMS gas sensor
作者： Sang-Choon Ko , Chi-Hoon Jun , Hyun-Woo Song , Seon-Hee Park
DOI: 10.5369/JSST.2008.17.3.183
关键词:
摘要: A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It realized by using a zinc oxide (ZnO) thin-film material with Ni-seed layer as sensing and bulk micromachining technology. To enhance sensitivity was embedded ZnO electrodes. As experimental results, changed resistance ratio HCHO 9.65 % 10 ppb, 18.06 100 35.7 1 ppm, respectively. In addition, minimum fabricated ppb gas. And measured output voltage about 0.94 V concentration. The noise 50 mV. response recovery times were 3 5 min, consumption power Pt micro-heater under testing 184 mW its operating temperature .
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