Energetic particles in the sputtering of an indium–tin oxide target

摘要: Energetic negative ions and neutral atoms were simultaneously observed using a time‐of‐flight apparatus during indium–tin oxide (ITO) film preparation by conventional planar magnetron sputtering of an ITO target. The was performed in pure Ar gas compared with ZnO: Al sputtering. particles such as O− O−2 O detected the spectra, although flux intensity these much less than that found ZnO It also other exist at same time, which thought to be reflected or O−3 from target surface. However, energetic atoms. strong particles, primarily bombarded substrate