Microphotonics devices based on silicon microfabrication technology
作者： T. Tsuchizawa , K. Yamada , H. Fukuda , T. Watanabe , Jun-ichi Takahashi
DOI: 10.1109/JSTQE.2004.841479
关键词:
摘要: This work presents our recent progress in the development of an Si wire waveguiding system for microphotonics devices. The Si wire waveguide promises size reduction and high-…
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T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, H. Morita, Low loss mode size converter from 0.3 /spl mu/m square Si wire waveguides to singlemode fibres Electronics Letters. ,vol. 38, pp. 1669- 1670 ,(2002) , 10.1049/EL:20021185
Tatsuhiko Fukazawa, Fumiaki Ohno, Toshihiko Baba, Very Compact Arrayed-Waveguide-Grating Demultiplexer Using Si Photonic Wire Waveguides Japanese Journal of Applied Physics. ,vol. 43, pp. 673- ,(2004) , 10.1143/JJAP.43.L673
Kevin K. Lee, Desmond R. Lim, Hsin-Chiao Luan, Anuradha Agarwal, James Foresi, Lionel C. Kimerling, Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model Applied Physics Letters. ,vol. 77, pp. 1617- 1619 ,(2000) , 10.1063/1.1308532
Jun-ichi Takahashi, Tai Tsuchizawa, Toshifumi Watanabe, Sei-ichi Itabashi, Oxidation-induced improvement in the sidewall morphology and cross-sectional profile of silicon wire waveguides Journal of Vacuum Science & Technology B. ,vol. 22, pp. 2522- 2525 ,(2004) , 10.1116/1.1800359
Sharee McNab, Nikolaj Moll, Yurii Vlasov, Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides Optics Express. ,vol. 11, pp. 2927- 2939 ,(2003) , 10.1364/OE.11.002927
Chiharu Takahashi, Yoshito Jin, Kazumi Nishimura, Seitaro Matsuo, Anisotropic Etching of Si and WSiN Using ECR Plasma of SF6–CF4Gas Mixture Japanese Journal of Applied Physics. ,vol. 39, pp. 3672- 3676 ,(2000) , 10.1143/JJAP.39.3672
Desmond R. Lim, Brent E. Little, Kevin K. Lee, Michael Morse, Harry H. Fujimoto, Hermann A. Haus, Lionel C. Kimerling, Micron-sized channel-dropping filters using silicon waveguide devices optical fiber communication conference. ,vol. 3847, pp. 65- 71 ,(1999) , 10.1117/12.371238
Kevin K. Lee, Desmond R. Lim, Lionel C. Kimerling, Jangho Shin, Franco Cerrina, Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction. Optics Letters. ,vol. 26, pp. 1888- 1890 ,(2001) , 10.1364/OL.26.001888
Koji Yamada, Tetsufumi Shoji, Tai Tsuchizawa, Toshifumi Watanabe, Jun-ichi Takahashi, Sei-ichi Itabashi, Silicon-wire-based ultrasmall lattice filters with wide free spectral ranges Optics Letters. ,vol. 28, pp. 1663- 1664 ,(2003) , 10.1364/OL.28.001663
Tetsuo Morosawa, Kenichi Saito, Yuji Takeda, Tatsuya Kunioka, Akira Shimizu, Junichi Kato, Tadahito Matsuda, Youichi Kuriyama, Yoshinori Nakayama, Yasuji Matsui, EB-X3: New electron-beam x-ray mask writer Journal of Vacuum Science & Technology B. ,vol. 17, pp. 2907- 2911 ,(1999) , 10.1116/1.591094