Fabrication of transparent conducting amorphous Zn-Sn-In-O thin films by direct current magnetron sputtering
作者： Cleva W. Ow-Yang , Hyo-young Yeom , David C. Paine
DOI: 10.1016/J.TSF.2007.07.205
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摘要: … Amorphous ZnO–SnO 2 –In 2 O 3 films were grown by direct current magnetron sputtering from vacuum hot pressed ceramic oxide targets of Zn:In:Sn cation ratios 1:2:1 and 1:2:1.5 onto …
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