An investigation of the microstructure, optical and electrical properties of ZITO thin film using the sol–gel method

作者: K. J. Chen , F. Y. Hung , S. J. Chang , S. J. Young , Z. S. Hu

DOI: 10.1007/S10971-010-2202-0

关键词: Materials scienceIndiumTransmittanceThin filmMicrostructureChemical engineeringMineralogyTransparent conducting filmDopantSol-gelDoping

摘要: The multi-compound ZITO transparent conductive oxide (TCO) thin films were synthesized using the sol–gel method. with various volume ratios of ZnO to ITO (1:1, 2:1 and 9:1) crystallized at different temperatures (600–700 °C). results showed that crystalline characteristics optical transmittance mainly dependent on content crystallization. Notably, 650 °C Z9ITO film not only had better conductivity but also possessed excellent transmittance. In addition, surface roughness optoelectric properties IZO (indium doped ZnO) analyzed confirm contribution indium dopants Also, subjected effects tin this improved related films.

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