Indium tin oxide films prepared via wet chemical route

作者: C Legnani , SAM Lima , HHS Oliveira , WG Quirino , R Machado

DOI: 10.1016/J.TSF.2007.06.137

关键词:

摘要: Abstract In this work, indium tin oxide (ITO) films were prepared using a wet chemical route, the Pechini method. This consists of polyesterification reaction between an α-hydroxicarboxylate complex (indium citrate and citrate) with polyalcohol (ethylene glycol) followed by post annealing at 500 °C. A 10 at.% doping Sn4+ ions into In2O3 matrix was successfully achieved through order to characterize structure, morphology as well optical electrical properties produced ITO films, they analyzed different experimental techniques. The obtained are highly transparent, exhibiting transmittance about 85% 550 nm. They crystalline preferred orientation [222]. Microscopy discloses that composed grains 30 nm average size 0.63 nm RMS roughness. films' measured resistivity, mobility charge carrier concentration 5.8 × 10− 3 Ω cm, 2.9 cm2/V s − 3.5 × 1020/cm3, respectively. While low value can be related small grain size, explained in terms high oxygen level resulting from thermal treatment process performed air. conditions being refined improve characteristics while good optical, chemical, structural morphological qualities already maintained.

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