The inter-metallic oxide of ZnO/ITO/ZnO tri-layer films using a heat-induced diffusion mechanism
作者： Kuan-Jen Chen , Fei-Yi Hung , Truan-Sheng Lui , Sheng-Po Chang , Wen-Lung Wang
DOI: 10.1016/J.APSUSC.2013.02.084
关键词:
摘要: Abstract This study presents a bias-crystallization mechanism (BCM) that is based on ZnO/In/ZnO tri-layer film and thermal annealing treatment ZnO/ITO/ZnO films. After biasing (40 V, 0.025 A), the resistivity of sample was reduced to 1.35 × 10 −2 Ω cm. Bias-induced Joule heat indium ion diffusion were critical factors with regard decreasing resistivity. When substituted for metal layer, ZnO/ITO (13 nm)/ZnO thin demonstrated comparatively better electrical properties optical transmittance. During annealing, tin atoms in ITO structure diffused into ZnO matrix improved conductivity film. Inter-metallic oxide (IMO) formed interface between interlayer, it dominated crystallization characteristics as well
harvard.edu
sci-hub.se 参考文章(19)
K. J. Chen, F. Y. Hung, S. J. Chang, S. J. Young, Z. S. Hu, S. P. Chang, An investigation of the microstructure, optical and electrical properties of ZITO thin film using the sol–gel method Journal of Sol-Gel Science and Technology. ,vol. 54, pp. 347- 354 ,(2010) , 10.1007/S10971-010-2202-0
Joondong Kim, Ju-Hyung Yun, Yun Chang Park, Wayne A. Anderson, Transparent and crystalline Al-doped ZnO film-embedded heterojunction Si solar cell Materials Letters. ,vol. 75, pp. 99- 101 ,(2012) , 10.1016/J.MATLET.2012.01.144
D.R. Sahu, Shin-Yuan Lin, Jow-Lay Huang, Investigation of conductive and transparent Al-doped ZnO/Ag/Al-doped ZnO multilayer coatings by electron beam evaporation Thin Solid Films. ,vol. 516, pp. 4728- 4732 ,(2008) , 10.1016/J.TSF.2007.08.089
Shumei Song, Tianlin Yang, Maoshui Lv, Yanhui Li, Yanqing Xin, Lili Jiang, Zhongchen Wu, Shenghao Han, Effect of Cu layer thickness on the structural, optical and electrical properties of AZO/Cu/AZO tri-layer films Vacuum. ,vol. 85, pp. 39- 44 ,(2010) , 10.1016/J.VACUUM.2010.03.008
Tianlin Yang, Zhisheng Zhang, Shumei Song, Yanhui Li, MaoShui Lv, Zhongchen Wu, Shenghao Han, Structural, optical and electrical properties of AZO/Cu/AZO tri-layer films prepared by radio frequency magnetron sputtering and ion-beam sputtering Vacuum. ,vol. 83, pp. 257- 260 ,(2008) , 10.1016/J.VACUUM.2008.05.029
Tran Le, Hoang Cao Son Tran, Hieu Van Le, Tuan Tran, Cao Vinh Tran, Thanh Tan Vo, Mau Chien Dang, Sang Sub Kim, Jaichan Lee, Bach Thang Phan, None, Unipolar resistance switching characteristics in a thick ZnO/Cu/ZnO multilayer structure Journal of the Korean Physical Society. ,vol. 60, pp. 1087- 1091 ,(2012) , 10.3938/JKPS.60.1087
Jaewook Jeong, Gwang Jun Lee, Joonwoo Kim, Byeongdae Choi, Scaling behaviour of a-IGZO TFTs with transparent a-IZO source/drain electrodes Journal of Physics D. ,vol. 45, pp. 135103- ,(2012) , 10.1088/0022-3727/45/13/135103
M F Al-Kuhaili, M A Al-Maghrabi, S M A Durrani, I A Bakhtiari, Investigation of ZnO/Al/ZnO multilayers as transparent conducting coatings Journal of Physics D. ,vol. 41, pp. 215302- ,(2008) , 10.1088/0022-3727/41/21/215302
K.J. Chen, F.Y. Hung, S.J. Chang, J.D. Liao, C.C. Weng, Z.S. Hu, The influences of plasma ion bombarded on crystallization, electrical and mechanical properties of Zn–In–Sn–O films Applied Surface Science. ,vol. 258, pp. 1157- 1163 ,(2011) , 10.1016/J.APSUSC.2011.09.056
Vrushali Shelke, B. K. Sonawane, M. P. Bhole, D. S. Patil, Electrical and optical properties of transparent conducting tin doped ZnO thin films Journal of Materials Science: Materials in Electronics. ,vol. 23, pp. 451- 456 ,(2012) , 10.1007/S10854-011-0462-2