Evolution of Phase Composition and Structure in Sapphire Implanted with 64Zn+ Ions and Heat-Treated in Oxygen

作者: V. V. Privezentsev , O. S. Zilova , A. A. Burmistrov , A. A. Batrakov , M. Yu. Presnyakov

DOI: 10.3103/S1062873818020193

关键词:

摘要: Single-crystal Al2O3 substrates are implanted with 64Zn+ ions using doses of 5 × 1016 cm–2 and an energy 100 keV. The samples annealed in oxygen a stepwise increase temperature from 400 to 1000°C. changes on the surface bulk sample analyzed via scanning electron microscopy, energy-dispersive analysis, transmission Auger spectroscopy.

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