Thermo-optic waveguide switch

摘要: The invention relates to a thermo-optic waveguide switch (1) which is located on substrate. Said comprises layer of glass, through (3, 8) extends. A hollow chamber (5) lies beneath the thermally decouples latter from At least two supports (6) are in provide mechanical stability. One production method for obtaining consists creating glass with an arrangement perforations one containing at formed by isotropically undercutting layer. subsequently sealed and above said chamber. Another first creates vicinity then removed using mask partially undercut isotropic etching process, thus forming below waveguide.