Cyclic powder formation during pulsed injection of hexamethyldisiloxane in an axially asymmetric radiofrequency argon discharge
作者： B. Despax , K. Makasheva , H. Caquineau
DOI: 10.1063/1.4761971
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摘要: A new approach of periodic production dusty plasma consisting pulsed injection hexamethyldisiloxane (HMDSO) in argon axially asymmetric radiofrequency (RF) discharge was investigated this work. The range operating conditions which can exist closely examined. obtained results clearly show that a net periodicity the formation/disappearance dust particles be maintained on very large scale duration. significance axial asymmetry to behaviour is revealed by development an shape void shifted towards powered RF electrode. key role reactive gas and its each stage oscillating process disclosed optical electrical measurements. It shown period inversely related HMDSO time. Moreover, impact time over short (5 s) indicates conflicting played reduction during reappearance off. electronegative behavior presence negatively charged seems explain energetic modifications discharge. frequency analysis floating potential reveals all these cyclic processes. Particularly, 10–200 Hz range, evolution one generation observed.
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J Winter, J Berndt, S-H Hong, E Kovačević, I Stefanović, O Stepanović, Dust formation in Ar/CH4 and Ar/C2H2 plasmas Plasma Sources Science and Technology. ,vol. 18, pp. 034010- ,(2009) , 10.1088/0963-0252/18/3/034010
Maxime Mikikian, Marjorie Cavarroc, Lénaïc Couëdel, Laïfa Boufendi, Low frequency instabilities during dust particle growth in a radio-frequency plasma Physics of Plasmas. ,vol. 13, pp. 092103- ,(2006) , 10.1063/1.2337793
Yukio Watanabe, Dust phenomena in processing plasmas Plasma Physics and Controlled Fusion. ,vol. 39, ,(1997) , 10.1088/0741-3335/39/5A/007
M. R. Alexander, F. R. Jones, R. D. Short, Mass Spectral Investigation of the Radio-Frequency Plasma Deposition of Hexamethyldisiloxane Journal of Physical Chemistry B. ,vol. 101, pp. 3614- 3619 ,(1997) , 10.1021/JP970663B
Marjorie Cavarroc, Maxime Mikikian, Yves Tessier, Laïfa Boufendi, Successive generations of dust in complex plasmas: a cyclic phenomenon in the void region. Physical Review Letters. ,vol. 100, pp. 045001- ,(2008) , 10.1103/PHYSREVLETT.100.045001
Abdelbasset Hallil, Bernard Despax, Internal r.f. plasma parameters correlated with structure and properties of deposited hydrocarbon films Thin Solid Films. ,vol. 358, pp. 30- 39 ,(2000) , 10.1016/S0040-6090(99)00719-1
Annemie Bogaerts, Renaat Gijbels, Jaroslav Vlcek, Collisional-radiative model for an argon glow discharge Journal of Applied Physics. ,vol. 84, pp. 121- 136 ,(1998) , 10.1063/1.368009
J. Berndt, E. Kovačević, I. Stefanović, O. Stepanović, S. H. Hong, L. Boufendi, J. Winter, Some Aspects of Reactive Complex Plasmas Contributions To Plasma Physics. ,vol. 49, pp. 107- 133 ,(2009) , 10.1002/CTPP.200910016
Kunihiro Kamataki, Hiroshi Miyata, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Masaharu Shiratani, Impacts of Amplitude Modulation of RF Discharge Voltage on the Growth of Nanoparticles in Reactive Plasmas Applied Physics Express. ,vol. 4, pp. 105001- 105001 ,(2011) , 10.1143/APEX.4.105001
Maxime Mikikian, Laifa Boufendi, André Bouchoule, Hubertus M Thomas, Gregor E Morfill, Anatoly P Nefedov, Vladimir E Fortov, None, Formation and behaviour of dust particle clouds in a radio-frequency discharge: results in the laboratory and under microgravity conditions New Journal of Physics. ,vol. 5, pp. 19- 19 ,(2003) , 10.1088/1367-2630/5/1/319