Impacts of Amplitude Modulation of RF Discharge Voltage on the Growth of Nanoparticles in Reactive Plasmas
作者： Kunihiro Kamataki , Hiroshi Miyata , Kazunori Koga , Giichiro Uchida , Naho Itagaki
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摘要: We have investigated the effects of plasma fluctuation on growth nanoparticles in capacitively-coupled rf discharges with amplitude modulation (AM). Nanoparticles grow more slowly for higher AM levels, which causes density to increase by 100% and their size decrease 23%. The number radicals nucleation is thought cause a radical flux nanoparticle because rate smaller than that nanoparticles. Therefore, this generation large amount small sizes.
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