Transport of nano-particles in capacitively coupled rf discharges without and with amplitude modulation of discharge voltage
作者： Kazunori Koga , Shinya Iwashita , Masaharu Shiratani
DOI: 10.1088/0022-3727/40/8/S05
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摘要: Transport of nano-particles in rf discharges without and with an amplitude modulation (AM) the discharge voltage has been examined using a two-dimensional laser-light-scattering method. During discharging period, are mainly generated plasma/sheath boundary region near powered electrode. They move away from their generation towards upper grounded electrode after turning off due to thermophoretic force. Using AM discharges, can be transported, during The transport time is at least six times shorter than that unmodulated discharges. Two key parameters for fast period AM.
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