Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas

摘要: We propose a simple theoretical model that describes the correlation between plasma fluctuation and of nanoparticle growth in reactive plasmas. The predicts high density nanoparticles brings about small mean size, narrow size dispersion, sharp slope on large side distribution. suggests some methods tuning it also self-limiting process is key to markedly suppressing fluctuations nanostructure fabrication. All predictions coincide with experimental results reported previously. Moreover, induces both linear nonlinear responses growth.