In situ analysis of size distribution of nano-particles in reactive plasmas using two dimensional laser light scattering method
作者： K Kamataki , Y Morita , M Shiratani , K Koga , G Uchida
DOI: 10.1088/1748-0221/7/04/C04017
关键词: Spatial distribution 、 Laser light scattering 、 Atomic physics 、 Range (particle radiation) 、 Nanoparticle 、 Distribution (mathematics) 、 Materials science 、 Dispersion (optics) 、 Plasma 、 Particle size
摘要: We have developed a simple in-situ method for measuring the size distribution (the mean (mean diameter) and dispersion) of nano-particles generated in reactive plasmas using 2 dimensional laser light scattering (2DLLS) method. The principle is based on thermal coagulation nano-particles, which occurs after discharge turned off, density can then be deduced. first determined 2D spatial smaller particle (a few nm) range than ones deduced from conventional 2DLLS From this dataset, we time been able to determine plasma without ex-situ measurements.
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