Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage
作者： Kunihiro Kamataki , Kazunori Koga , Giichiro Uchida , Naho Itagaki , Daisuke Yamashita
DOI: 10.1016/J.TSF.2012.07.059
关键词: Edge (geometry) 、 Optics 、 Nanoparticle 、 Plasma processing 、 Materials science 、 Analytical chemistry 、 Amplitude modulation 、 Voltage 、 Radio frequency 、 Deposition (law) 、 Electrode
摘要: Abstract We investigate uniformity of radial density profile nano-particles in capacitively-coupled radio frequency discharge with an amplitude modulation (AM) rf voltage, by a two-dimensional laser light scattering method. Their densities at the center and that edge electrode increase 3 24 times when level increases from 0 (without AM) to 30%. The is significantly improved using AM
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