Adaptive vibration control of micro-cantilever beam with piezoelectric actuator in MEMS

摘要: This paper proposes a dynamical model and the governing equations of motion micro-cantilever beams based MEMS with piezoelectric actuator (PZT). The Rayleigh–Ritz method is used to reduce order system state are presented in modal space. first ten mode frequencies shapes beam without PZT studied. effects on can be ignored for reason that holds larger nature Q values micro-scale. A rational linearizing feedback controller high gain observer designed eliminate unwanted deflection system. open-loop step response situated places frequency responses discussed. Various system, subject different applied control voltages gains, illustrated. four resonances well controlled, while anti-resonance has little change. Computer simulations provided demonstrate performance scheme.