Surface technology and ESD protection: towards highly reliable GaAs microwave circuits

摘要: The influence of surface technological processes is reviewed with special emphasis on increased device reliability and lifetime. Surface quality plays a significant role in many degradation mechanisms because it influences all such as etching, metal evaporation annealing well passivation quality. It shown that hardening extremely important could perhaps be performed by suitable cleaning brief chemical passivation. Lifetimes are also limited electrical stress during the fabrication devices, assembly systems operation. To get satisfactory protection at microwave frequencies there need to protect circuits against electrostatic discharges transients. development properties promising new concept based field emission switches presented.