Ito film treated by nitrogen plasma and the organic luminescent device using the same

作者: Sang Young Jeon , Se Hwan Son , Min Soo Kang , Jong Geol Kim

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摘要: Disclosed are an Indium Tin Oxide (ITO) film, wherein nitrogen-containing compounds produced by reactions of nitrogen with at least one atom selected from the group consisting In, Sn and 0 atoms which constitutional elements ITO, or deposited present on a surface ITO film; method for preparing comprising step treating film plasma. An organic elect roluminescent device using provided invention as anode shows low voltage, high efficiency long lifetime.

参考文章(24)
Shingo Ohno, Taichi Kobayashi, Masato Yoshikawa, Yoshinori Iwabuchi, Yukihiro Kusano, Transparent conductive film and method for manufacture thereof, and touch panel ,(2002)
James C. Sturm, Chung-Chih Wu, Plasma treatment of conductive layers ,(1997)
W. Song, S.K. So, L. Cao, Angular-dependent photoemission studies of indium tin oxide surfaces Applied Physics A Materials Science & Processing. ,vol. 72, pp. 361- 365 ,(2001) , 10.1007/S003390000534
Shizuo Fujita, Takeshi Sakamoto, Kentaro Ueda, Kazuki Ohta, Shigeo Fujita, Surface Treatment of Indium-Tin-Oxide Substrates and Its Effects on Initial Nucleation Processes of Diamine Films Japanese Journal of Applied Physics. ,vol. 36, pp. 350- 353 ,(1997) , 10.1143/JJAP.36.350
HY Yu, XD Feng, D Grozea, ZH Lu, RNS Sodhi, AM Hor, H Aziz, None, Surface electronic structure of plasma-treated indium tin oxides Applied Physics Letters. ,vol. 78, pp. 2595- 2597 ,(2001) , 10.1063/1.1367897
Ching-Ting Lee, Qing-Xuan Yu, Bang-Tai Tang, Hsin-Ying Lee, Effects of plasma treatment on the electrical and optical properties of indium tin oxide films fabricated by r.f. reactive sputtering Thin Solid Films. ,vol. 386, pp. 105- 110 ,(2001) , 10.1016/S0040-6090(01)00777-5
J. S. Kim, M. Granström, R. H. Friend, N. Johansson, W. R. Salaneck, R. Daik, W. J. Feast, F. Cacialli, Indium-tin oxide treatments for single- and double-layer polymeric light-emitting diodes: The relation between the anode physical, chemical, and morphological properties and the device performance Journal of Applied Physics. ,vol. 84, pp. 6859- 6870 ,(1998) , 10.1063/1.368981
I-Min Chan, Weng-Cheng Cheng, Franklin C. Hong, Enhanced performance of organic light-emitting devices by atmospheric plasma treatment of indium tin oxide surfaces Applied Physics Letters. ,vol. 80, pp. 13- 15 ,(2002) , 10.1063/1.1428624