Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films
作者： J. Steinhauser , S. Faÿ , N. Oliveira , E. Vallat-Sauvain , C. Ballif
DOI: 10.1063/1.2719158
关键词:
摘要: A comprehensive model for the electronic transport in polycrystalline ZnO: B thin films grown by low pressure chemical vapor deposition is presented. The optical mobilities and carrier concentration calculated from reflectance spectra using the Drude model were compared with the data obtained by Hall measurements. By analyzing the results for samples with large variation of grain size and doping level, the respective influences on the transport of potential barriers at grain boundaries and intragrain scattering could be separated …
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(15)
C. Marcel, N. Naghavi, G. Couturier, J. Salardenne, J. M. Tarascon, Scattering mechanisms and electronic behavior in transparent conducting ZnxIn2Ox+3 indium–zinc oxide thin films Journal of Applied Physics. ,vol. 91, pp. 4291- 4297 ,(2002) , 10.1063/1.1445496
J. Bruneaux, H. Cachet, M. Froment, A. Messad, Correlation between structural and electrical properties of sprayed tin oxide films with and without fluorine doping Thin Solid Films. ,vol. 197, pp. 129- 142 ,(1991) , 10.1016/0040-6090(91)90226-N
C. Agashe, O. Kluth, J. Hüpkes, U. Zastrow, B. Rech, M. Wuttig, Efforts to improve carrier mobility in radio frequency sputtered aluminum doped zinc oxide films Journal of Applied Physics. ,vol. 95, pp. 1911- 1917 ,(2004) , 10.1063/1.1641524
A. Shah, J. Meier, A. Buechel, U. Kroll, J. Steinhauser, F. Meillaud, H. Schade, D. Dominé, Towards Very Low-Cost Mass Production of Thin-film Silicon Photovoltaic (PV) Solar Modules on Glass Thin Solid Films. ,vol. 502, pp. 292- 299 ,(2006) , 10.1016/J.TSF.2005.07.299
Z.‐C. Jin, I. Hamberg, C. G. Granqvist, Optical properties of sputter-deposited ZnO:Al thin films Journal of Applied Physics. ,vol. 64, pp. 5117- 5131 ,(1988) , 10.1063/1.342419
K Ellmer, Resistivity of polycrystalline zinc oxide films: current status and physical limit Journal of Physics D. ,vol. 34, pp. 3097- 3108 ,(2001) , 10.1088/0022-3727/34/21/301
N R Aghamalyan, I A Gambaryan, E Kh Goulanian, R K Hovsepyan, R B Kostanyan, S I Petrosyan, E S Vardanyan, A F Zerrouk, Influence of thermal annealing on optical and electrical properties of ZnO films prepared by electron beam evaporation Semiconductor Science and Technology. ,vol. 18, pp. 525- 529 ,(2003) , 10.1088/0268-1242/18/6/322
D Mergel, Z Qiao, Dielectric modelling of optical spectra of thin In2O3 : Sn films Journal of Physics D. ,vol. 35, pp. 794- 801 ,(2002) , 10.1088/0022-3727/35/8/311
Zhaohui Qiao, Chitra Agashe, Dieter Mergel, Dielectric modeling of transmittance spectra of thin ZnO:Al films Thin Solid Films. ,vol. 496, pp. 520- 525 ,(2006) , 10.1016/J.TSF.2005.08.282
I. Hamberg, C. G. Granqvist, Evaporated Sn‐doped In2O3films: Basic optical properties and applications to energy‐efficient windows Journal of Applied Physics. ,vol. 60, pp. R123- R160 ,(1986) , 10.1063/1.337534