Integrated circuit connector access region

作者: Shih-Hung Chen

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摘要: A connector access region of an integrated circuit device includes a set parallel conductors, extending in first direction, and interlayer connectors. The conductors comprise electrically conductive contact areas on different which define plane with the below plane. line at oblique angle, such as less than 45° or 5° to 27°, direction. connectors are electrical extend above At least some overlie but isolated from adjacent contact. may include layers being generally perpendicular layers.

参考文章(6)
Yen-Hao Shih, Hang-Ting Lue, Shih-Hung Chen, Nand flash with non-trapping switch transistors ,(2011)
Hong-Ji Lee, Hang-Ting Lue, Shih-Hung Chen, Chin-Cheng Yang, Multilayer Connection Structure and Making Method ,(2011)
Yen-Hao Shih, Hang-Ting Lue, Shih Hung Chen, Damascene Word Line ,(2012)
Hsiang-Lan Lung, Rich Liu, Shih-Hung Chen, Yi-Chou Chen, Single-mask phase change memory element ,(2006)
Hong-Ji Lee, Hang-Ting Lue, Shih-Hung Chen, Chin-Cheng Yang, Method for making multilayer connection structure ,(2011)