Scalable pattern matching between a pattern clip and a pattern library
作者： Paul C. Liu , Weiping Fang , Ke Fan , Jun Zhu , Yuli Xue
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摘要: A two-level matching technique is described. system can generate a set of index patterns based on library in pattern library. The include that are expected to have problems during manufacturing. Next, the use fast process check if first-level clip potentially matches one or more from patterns. If so, detailed match second-level with correspond Otherwise, report does not any
lens.org 参考文章(1)
Srinivas Doddi, Ya-Chieh Lai, Kuanghao Lay, Weiping Fang, Frank E. Gennari, Matthew Moskewicz, Junjiang Lei, Method and system for model-based design and layout of an integrated circuit ,(2012)