Substrate processing device and method
作者： Junro Sakai , Nobuyuki Takahashi
DOI:
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摘要: A substrate processing device is provided in which an interior rotating body for a holder, the of vacuum chamber, and external body, exterior said are magnetically coupled, includes can-seal type magnetic coupling-type rotation introduction mechanism which, by rotational movement abovementioned controls body. heat-accumulating member, maintained at predetermined temperature, performing heat exchange between member chamber interior.
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