Silicon Technologies for Microsystems, Microsensors and Nanoscale Devices

摘要: This chapter provides a brief overview of the most relevant current silicon processing technologies. A number high potential future techniques are also presented. Systems based upon almost ubiquitous in today’s world; as material, is required to accommodate growing needs an increasingly demanding society. consequence this constant drive for cheaper solutions providing these systems, which further supports culture innovation The selected described here, have been developed answer specific challenges integrating electronic systems into real-world environment, provide insight ways being transformed. They represent only sample innovative research field processing.