ONE DIMENSIONAL SIMULATION OF DC BIASED ARGON PLASMA USING COMSOL MULTIPHYSICS

摘要: The character of a argon plasma in DC biased reactor was simulated using 1-dimensional model. model and simulation carried out COMSOL multiphysics software. Results the show that can be used to predict state Ar such as distribution electron density Ar+ ion, temperature, electric potential space. Furthermore, predicts is formed near cathode (r<0.5 cm) at end simulation. And, higher pressure produced pressures less than 100 Pa.