Micro-texturing into DLC/diamond coated molds and dies via high density oxygen plasma etching

摘要: Diamond-Like Carbon (DLC) and Chemical Vapor Deposition (CVD)-diamond films have been widely utilized not only as a hard protective coating for molds dies but also functional substrate bio-MEMS/NEMS. Micro-texturing into these coated provides productive tool to duplicate the original mother micro-patterns onto various work materials construct any tailored micro-textures sensors actuators. In present paper, high density oxygen plasma etching method is make micro-line micro-groove patterns DLC diamond coatings. Our developing system introduced together with characterization on state during etching. this quantitative diagnosis, both population of activated species electron ion densities are identified through emissive light spectroscopy Langmuir probe method. addition, on-line monitoring plasmas helps describe process. WC (Co) specimen first employed mechanism by (CVD) demonstrate reliable capacity This performance discussed comparison rates.