Diamond MEMS — a new emerging technology
作者： E Kohn , P Gluche , M Adamschik
DOI: 10.1016/S0925-9635(98)00294-5
关键词:
摘要: Abstract Diamond is a superhard, wide bandgap, semiconductor material of high mechanical strength and thermal stability therefore an ideal candidate for micro electromechanical devices. Using these properties in diamond-on-Si technology, number sensors actuators have been attempted. However, their industrial implementation lags far behind that silicon microelectromechanical systems (Si-MEMS) technologies. In this study, highly oriented chemical vapor deposition (CVD) diamond films were deposited on large area Si-substrates, micromachined into structured membranes applied to two demonstrators: seismic mass membrane acceleration sensor liquid ejector based microspot heater. the outstanding extreme are already widely reflected performance demonstrators. The technology may be scaled implemented existing Si-based microsystem technologies open up possibility integrate MEMS mainstream.
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sci-hub.se 参考文章(35)
M. N. Touzelbaev, K. E. Goodson, Impact of Nucleation Density on Thermal Resistance near Diamond-Substrate Boundaries Journal of Thermophysics and Heat Transfer. ,vol. 11, pp. 506- 512 ,(1997) , 10.2514/2.6291
H. Verhoeven, E. Boettger, A. Flöter, H. Reiß, R. Zachai, Thermal resistance and electrical insulation of thin low-temperature-deposited diamond films Diamond and Related Materials. ,vol. 6, pp. 298- 302 ,(1997) , 10.1016/S0925-9635(96)00681-4
G. Zhao, E. M. Charlson, E. J. Charlson, T. Stacy, J. M. Meese, G. Popovici, M. Prelas, Effect of mechanical stress on current-voltage characteristics of thin film polycrystalline diamond Schottky diodes Journal of Applied Physics. ,vol. 73, pp. 1832- 1837 ,(1993) , 10.1063/1.353168
N.V. Novikov, S.N. Dub, Hardness and fracture toughness of CVD diamond film Diamond and Related Materials. ,vol. 5, pp. 1026- 1030 ,(1996) , 10.1016/0925-9635(95)00346-0
P. Gluche, R. Leuner, A. Vescan, W. Ebert, E. Kohn, C. Rembe, S. aus der Wiesche, E. P. Hofer, Actuator – sensor technology on “electronic grade” diamond films Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 5, pp. 38- 43 ,(1998) , 10.1007/S005420050138
M. Werner, R. Locher, W. Kohly, D.S. Holmes, S. Klose, H.J. Fecht, The diamond Irvin curve Diamond and Related Materials. ,vol. 6, pp. 308- 313 ,(1997) , 10.1016/S0925-9635(96)00683-8
W. L. Wang, X. Jiang, K. Taube, C.-P. Klages, Piezoresistivity of polycrystalline p-type diamond films of various doping levels at different temperatures Journal of Applied Physics. ,vol. 82, pp. 729- 732 ,(1997) , 10.1063/1.365606
Masahiro Deguchi, Nobuhiro Hase, Makoto Kitabatake, Hidetoshi Kotera, Susumu Shima, Masatoshi Kitagawa, Piezoresistive property of CVD diamond films Diamond and Related Materials. ,vol. 6, pp. 367- 373 ,(1997) , 10.1016/S0925-9635(96)00727-3
A. Flöter, H. Güttler, G. Schulz, D. Steinbach, C. Lutz-Elsner, R. Zachai, A. Bergmaier, G. Dollinger, The nucleation and growth of large area, highly oriented diamond films on silicon substrates Diamond and Related Materials. ,vol. 7, pp. 283- 288 ,(1998) , 10.1016/S0925-9635(97)00245-8
M. Aslam, G.S. Yang, A. Masood, Boron-doped vapor-deposited diamond temperature microsensors Sensors and Actuators A-physical. ,vol. 45, pp. 131- 137 ,(1994) , 10.1016/0924-4247(94)00830-2